3-Dimensional Process Simulation Rutilius Taurus Aemilianus Zeittransformationen41

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3-Dimensional Process Simulation Rutilius Taurus Aemilianus Zeittransformationen41Whereas two dimensional semiconductor process simulation has achieved a certain degree of maturity, three dimensional process simulation is a newly emerging field in which most efforts are dedicated to necessary basic developments. Research in this area is promoted by the growing demand to obtain reliable information on device geometries and dopant distributions needed for three dimensional device simulation, and challenged by the great algorithmic